- Can place wafers on SiC tray manulally. Chips or different size of wafers can be placed on SiC Tray..
- Small Footprint for R&D and Pilot Production.
- Various Types of Film (SiO2, Al2O3, Etc) is available.
D501
- Batch Type APCVD, with a Large Tray to place variety size of Wafers.
- Various Types of Film (SiO2, Al2O3, Etc)
